batch spray
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Fsi International
FSI International, Inc.
FSI International Inc., is a global supplier of surface conditioning equipment, technology and support services for microelectronics manufacturing. Using the company
baking, exposure, lithography, chaska, cryogenic, immersion, vapor, aries, etch, mems, cleaning systems, semiconductor equipment, dram, 200mm, photolithography, photoresist, process development, 300mm, 130nm, 65nm, 90nm, antares cx advanced, back-end-of-line, batch processing techniques, batch spray, beol strip, centrifugal spray, critical cleaning, critical etching, defect removal, dio3 ozone generator, dry etch, excalibur 2000 vapor hf etching system, feol strip, front-end-of-line, fsi international inc., hf etcher, magellan immersion cleaning system, mercury spray processing systems, mfsi, microlithography, nanostructure formation, new material challenges, next-generation design rule applications, okayama, orion dry cleaning module, particle reduction, particle removal, photo-chemical, photosensitive materials, polaris 2500 microlithography cluster, polaris 3500 microlithography cluster, post-deposition, pre-deposition, resist processing, saturn/titan, silicon wafers, single wafer spray, thin film head, vapor hf processor, wafer cleaning, wafer processing technology, yieldup rinse dry modules and immersion etch syste, zeta spray processing systems
